@article{oai:ritsumei.repo.nii.ac.jp:00001400, author = {肥塚, 浩}, issue = {1}, journal = {立命館経済学, 立命館経済学}, month = {Apr}, pages = {116--142}, title = {日本半導体製造装置産業の分析}, volume = {41}, year = {1992} }