@phdthesis{oai:ritsumei.repo.nii.ac.jp:00011192,
 author = {川波多, 裕司},
 month = {2019-12-05, 2019-12-05, 2019-12-05},
 school = {立命館大学},
 title = {砥粒挙動を重視した高性能複合ラッピング定盤の開発},
 year = {}
}