@misc{oai:ritsumei.repo.nii.ac.jp:00011137,
 author = {Pham, Hong  Phuc},
 month = {2019-12-05, 2019-12-05},
 title = {Study on Micro Transportation Systems Based on Electrostatic Actuators Utilizing Micro Electro Mechanical Systems(MEMS) Technology},
 year = {}
}