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2021-06-18T13:29:52+09:00
2021-06-18T13:29:52+09:00
2021-06-18T13:29:52+09:00
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Ritsumeikan Univ.KO-246
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1 g
10 36 574.5 780 re
f
BT
0 g
/TT0 1 Tf
14.25 0 0 14.25 54.2137 788.25 Tm
(A Study on Analysis of Vibration Characteristics of Ultrasonic Au Wire-B\
onder)Tj
/TT1 1 Tf
12 0 0 12 491.6992 759.75 Tm
(Kazuya Ikoma)Tj
-37.267 -2.313 Td
(In the assembly process of most of semiconductor integrated circuits suc\
h as LSI, the ultrasonic Au wire-)Tj
-1 -1.5 Td
(bonder is used as the main equipment. The aim of this study is to clarif\
y vibration characteristics of its horn)Tj
0 -1.5 TD
(and capillary system by experimental and theoretical analyses. Though su\
ch characteristics are of)Tj
T*
(fundamental importance in adjusting and improving ultrasonic vibration a\
pplied by the wire-bonder,)Tj
T*
(systematic and detailed studies about them have been hardly done.)Tj
1 -2.5 Td
(In this study, resonance characteristics of a 65kHz Au wire- bonder are \
firstly measured by a laser Doppler)Tj
-1 -1.5 Td
(vibrometer in both cases with the capillary tip free and pressed to a si\
mulated work piece \(SK4\). From these)Tj
T*
(results, the relation between resonance frequency )Tj
/TT2 1 Tf
19.963 0 Td
(f)Tj
/TT1 1 Tf
( and capillary length )Tj
/TT2 1 Tf
8.719 0 Td
(l)Tj
/TT1 1 Tf
( \()Tj
/TT2 1 Tf
(f-l)Tj
/TT1 1 Tf
( curve\) is made clear, and)Tj
-28.683 -1.5 Td
(resonance modes of the horn and the capillary are also shown clearly in \
two cases of different )Tj
/TT2 1 Tf
37.736 0 Td
(l)Tj
/TT1 1 Tf
(. For the)Tj
-37.736 -1.5 Td
(resonance mode of the capillary, measurements are also carried out by us\
ing other simulated work pieces)Tj
T*
(including Au ball.)Tj
1 -2.5 Td
(Secondly, natural vibrations of the horn and capillary system are analyz\
ed theoretically based on a tapered)Tj
-1 -1.5 Td
(beam model, and the results are compared with the above experimental res\
ults. In this analysis, general)Tj
T*
(solutions of free vibration are mainly used, and the shear force at capi\
llary tip is assumed to be a spring force.)Tj
T*
(It is shown that main experimental results are explained well by this an\
alysis.)Tj
1 -2.5 Td
(Finally, the effects of damping on characteristics of natural vibrations\
are treated. Experimentally, damped)Tj
-1 -1.5 Td
(free vibrations after ultrasonic excitation are measured to know the deg\
ree of participating damping.)Tj
T*
(Theoretically, assuming the shear force at capillary tip is composed of \
spring force and equivalent viscous)Tj
T*
(damping force, damped natural vibrations are analyzed on the tapered bea\
m model by using the transfer)Tj
T*
(matrix method. From these results, the relation between natural frequenc\
y )Tj
/TT2 1 Tf
29.824 0 Td
(f)Tj
/TT1 1 Tf
( and equivalent viscous damping)Tj
-29.824 -1.5 Td
(coefficient )Tj
/TT2 1 Tf
4.525 0 Td
(C)Tj
/TT1 1 Tf
( is obtained, and a mechanical method to evaluate the shear force at cap\
illary tip is given based)Tj
-4.525 -1.5 Td
(on this relation and the capillary mode.)Tj
ET
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