%PDF-1.6
%
1 0 obj
<>
endobj
2 0 obj
<>stream
2021-06-18T13:46:23+09:00
2021-06-18T13:46:23+09:00
2021-06-18T13:46:23+09:00
Adobe Acrobat 21.0
application/pdf
Ritsumeikan Univ.KO-605
uuid:3efa8746-77d1-4b1f-ad8d-fcf2a8d3e896
uuid:c663961c-4576-4ef8-9500-dec4d0b8e88a
Acrobat Web Capture 15.0
endstream
endobj
5 0 obj
<>
endobj
6 0 obj
<>
endobj
3 0 obj
<>
endobj
7 0 obj
<>
endobj
10 0 obj
<>/ProcSet[/PDF/Text]>>/Type/Page>>
endobj
11 0 obj
<>stream
1 g
10 36 574.5 780 re
f
BT
0 g
/TT0 1 Tf
14.25 0 0 14.25 50.6443 788.25 Tm
(Study on Fabrication of Submicrometer Structures Using Synchrotron Radia\
tion)Tj
9.319 -1.211 Td
(Lithography for Optical Applications)Tj
/TT1 1 Tf
12 0 0 12 490.9961 742.5 Tm
(Fumiki KATO)Tj
-37.208 -2.313 Td
(In this research, process techniques using synchrotron radiation \(SR\) \
x-ray lithography to fabricate a high-)Tj
-1 -1.5 Td
(aspect-ratio structure and three-dimensional structures with sub-micron \
for optical applications were)Tj
0 -1.5 TD
(developed. Four fabricated optical components are reported in this work:\
a high-aspect-ratio diffractive)Tj
T*
(optical element \(DOE\) for visible light, a blazed DOE for infrared lig\
ht, an anti-reflective structure of poly-)Tj
T*
(methyl-methacrylate \(PMMA\), and an x-ray telescope mirror element of n\
ickel. Evaluations for optical)Tj
T*
(characteristic of each optical component are summarized. )Tj
T*
(In the fabrication of the high-aspect-ratio DOE: a grating with a line-w\
idth of 250 nm and an aspect ratio of 8)Tj
T*
(was formed by the direct x-ray exposure. The grating was measured the di\
ffraction efficiency irradiating a)Tj
T*
(406 nm-wavelength laser. The measured efficiency was fitted in less than\
10% of the error from that of the)Tj
T*
(ideal cross-sectional structure. The result confirms that the element is\
compatible with the application of blue-)Tj
T*
(ray disc.)Tj
T*
(In the fabrication of blazed optical element: a grating with a pitch of \
1.48 )Tj
/C2_0 1 Tf
29.573 0 Td
<021D>Tj
/TT1 1 Tf
(m and 600 nm-height was realized)Tj
-29.573 -1.5 Td
(by PCT \(Plane-pattern to Cross section Transfer\) method for an applica\
tion of wavelength division)Tj
T*
(multiplexer for optical communication. The fabricated structure has achi\
eved an aim in shape. The surface)Tj
T*
(roughness has yet to be improved for the optical application.)Tj
T*
(In the fabrication of anti-reflective structure: a sub-wavelength struct\
ure was successfully fabricated using a)Tj
T*
(variable-gap-exposure. This result showed the acceptable filter characte\
ristic which absorbs approximately)Tj
T*
(65% at wavelength 350-700 nm.)Tj
T*
(In the fabrication of x-ray telescope mirror element: smooth surface rou\
ghness and high aspect ratio structure)Tj
T*
(is required. A nickel mirror element was fabricated using Lithographie G\
alvanik Abformung \(LIGA\) process.)Tj
T*
(The grinding method by a magnetic fluid was employed for reducing the su\
rface roughness. The mirror)Tj
T*
(surface roughness was reduced to 4 nm\(r.m.s.\) and the reflectance of x\
-ray light is measure. From the result,)Tj
T*
(the light weight x-ray telescope is prospected for satellite)Tj
T*
(The results from development of the four optical elements confirm that t\
he fabrication technology using SR)Tj
T*
(lithography is technologically remarked for the optical applications of \
infrared light, visible light and x-ray)Tj
T*
(light.)Tj
ET
endstream
endobj
12 0 obj
<>
endobj
13 0 obj
(S0Q{M)
endobj
14 0 obj
<>
endobj
15 0 obj
<>
endobj
16 0 obj
<>
endobj
21 0 obj
<>
endobj
22 0 obj
<>stream
H\An@E"DB;$ Cۃ4~D$.އ|nrG}ܱ.56©eڮ>\Yo)wqȪ?onp
Ofus'pk15Qo9|^kn=5ncp|L32Mu
YHUXeoO@bN=كɏ'xCހ-d=%y .$`!%J%+[ rM^'>K,aAaAaAaAaAa^A^y&?]]]]^W={tV8+zE^z+
_~GEEEEEEEEQK˘ːlp6:glp6:glp6~tfܵi4Ӹ#: &* w
endstream
endobj
23 0 obj
<>stream
H|w\TWg3CDfƲb$AjdWQc!AQ DH6Dc"6TeF4G0;b~>{ιwwy ~
:6j2a /3ҍE +)Ojj=}R'-hPob\8/0Tk_+ةzxa_7)8 MSyj!qj7RgFf@8mtw8@_'ml:m*O$GDQ*D&d%Y+k$uDaXwqtjʈNy
5әhgv3v!XxAQ-!7F1j45߄Sʬ{yUX-(zHj1*F9,\N
-Q&M^?}IL>m泶!_]ڭ=zo?%uA1t}?rT1?q'dL4yJig̛5{\/XPp%KYXJZh6nڼe;vڽg8X|ǎ8yϜ=wE\b]-mP4BCF[ctլ¤P)Sʖ&JSsH,|_~uحoֻ
Ɇcwhf'JbPZ+.JWClRUyuwgTڭw7<%ֽ=V)Kk--Vd
5dz%"dsIfRy9+,# W(\%gɓ8[pF{Ӽ;yo}|teM[["E;]o}~