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MEMS共振器デバイスとシミュレーションについての研究
https://doi.org/10.34382/00010670
https://doi.org/10.34382/00010670a910a1f8-d069-4a63-9a48-7de8bc18fea8
名前 / ファイル | ライセンス | アクション |
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審査結果要旨 (122.2 kB)
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要旨(和・英) (99.7 kB)
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本文 (6.8 MB)
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
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公開日 | 2017-10-24 | |||||
タイトル | ||||||
タイトル | MEMS共振器デバイスとシミュレーションについての研究 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_db06 | |||||
資源タイプ | doctoral thesis | |||||
ID登録 | ||||||
ID登録 | 10.34382/00010670 | |||||
ID登録タイプ | JaLC | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
URI | ||||||
http://hdl.handle.net/10367/7235 | ||||||
http://hdl.handle.net/10367/7235 | ||||||
タイトル(その他) | ||||||
その他のタイトル | Study of MEMS Resonator Devices and Simulation | |||||
著者 |
谷川, 紘
× 谷川, 紘 |
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著者名(その他) | ||||||
姓名 | TANIGAWA, Hiroshi | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
学位授与番号 | ||||||
学位授与番号 | 乙第543号 | |||||
学位授与年月日 | ||||||
学位授与年月日 | 2016-03-04 | |||||
学位名 | ||||||
学位名 | 博士(工学) | |||||
学位授与機関 | ||||||
学位授与機関識別子Scheme | kakenhi | |||||
学位授与機関識別子 | 34315 | |||||
学位授与機関名 | 立命館大学 |